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Hybrid Metrology Computer Chip (8004261708)

Hybrid Metrology Computer Chip (8004261708)

 
 
description

Summary

This tiny silicon pillar, measuring less than 100 nanometers along any of its sides, is the sort of computer chip feature that manufacturers now can measure more precisely with NIST's hybrid metrology method, which can reduce the nagging uncertainties that have long plagued industry's measurement efforts.
See also www.nist.gov/pml/div683/hybrid-090512.cfm
Credit: NIST
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Date

31/08/2012
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Source

Hybrid Metrology Computer Chip
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